IMEC

高腾Teng Gao

1991年获得东南大学工学学士学位，1995年获得比利时鲁汶大学工学硕士学位，2000年获得比利时鲁汶大学（IMEC）博士学位。博士研究课题主要针对深亚微米CMOS工艺的工艺集成，特别是连线技术以及所采用的低介电常数绝缘材料的应用。自1999年开始，作为IMEC正式雇员加入其业务开发部，参与多个合作项目的谈判，客户来自欧洲、美国、新加坡、中国与日本。2000年被任命为亚洲部经理，负责为IMEC开拓亚洲（除日本）市场。在短短几年时间内，先后完成了与无锡微电子所的技术转移合同，与上海华虹集团的技术培训、技术转移与技术合作合同，与中芯国际关于先进工艺技术授权的合同的谈判工作，并负责每个项目的沟通与执行，以保证合同的顺利完成。曾参与推动建立国家微电子研发中心的工作。2004年5月，在IMEC为来访的温家宝总理等国家领导人做专题报告。

He received EE bachelor from Southeast University, China, in 1991. He received EE master from the Katholieke Universiteit Leuven, Belgium, in 1995, and Ph.D. from the Katholieke Universiteit Leuven (IMEC), Belgium, in 2000. The Ph.D. research area was focused on "deep sub-micron CMOS technology process integration", especially for the interconnect technology and the integration of low-k dielectric material. Starting from 1999, he joined IMEC as formal employee in the Business Development department, being involved into several projects with partners from Europe, USA, and Asia. He was appointed as the Asia Liaison Manager in 2000, and is mainly in charge of the business development in Asia (except Japan). In the following years, he successfully helped IMEC establishing cooperation partnership with Wuxi Microelectronic Institute, Shanghai Huahong, and SMIC. He also helped to successfully execute the contracts. He has been involved into the activities of pushing the setup of national microelectronic R&D center. In May 2004, he gave a special topic presentation to Premier Wen Jiabao and other ministers of PRC during their visit in IMEC.

从微电子到纳米电子

---挑战和出路

四十年前所提出的关于半导体技术发展规律的“摩尔定律”，已被半导体产业的努力奋斗所证明是基本正确的。随着技术尺寸走到纳米级，我们即将面临CMOS的物理极限、技术极限和经济极限的到来，因此预计“摩尔定律”还可适用十五年，直到2020年。在这十五年中，我们面临两个重大的任务：一是要去克服通向CMOS极限的所有技术障碍，努力使“摩尔定律”顺利走完这十五年，以及使技术按照SIA的ROADMAP发展。二是要研究全新的技术、材料、结构和工艺，以准备走进“后CMOS”时代。这两个任务，以及所限定的有限时间，意味着所需的研发费用将急剧增加，即使是最大的公司也难以独立支撑。唯一的出路就是产业界内广泛的密切的合作研究。IMEC为这种合作提供了一个先进合理的平台，并已经吸引了许多著名公司加入。这两年的技术合作已这个平台上结出累累硕果，并推动建成了一条全球唯一的十二寸中试研发线。

From Microelectronics to Nanoelectronics---Challenges and solutions

Moore’s Law has been demonstrated by 40 years semiconductor technology progress. We are going to face the coming limits-- physical, technological and economic--for CMOS. It is expected that “Moore’s Law” will probably work, till these limits been reached around 2020. Within the following 15 years, we have two important missions. One is to overcome all technical barriers towards the CMOS limit, and let the “Moore’s Law” to be right during these years too. Another is to start the research work for new technologies, new materials, new device structures and new processes, in order to be ready to enter the “Post CMOS” Era. These two missions, with limited time frame, will lead to enormous increase of the research cost required, which is also difficult for a leading company to support by itself. The only solution is to establish a “partnership for research” within the industry for closer cooperation. IMEC provide a cutting-edge research platform for such partnership cooperation, and has attracted many key industry players to attend. Several technology breakthroughs have been achieved at this platform during these years, together with the establishment of a unique 300mm pilot line in the world for research purpose only.